Evaluation of the Schwarzschild x-ray microscope using the compact SR-ring 'AURORA'

Shin Masui; Shouichirou Mochimaru; Norio Watanabe; Yoshiaki Horikawa; Hironari Yamada; Hiroshi Kihara

doi:10.1117/12.138723

13 January 1993 Evaluation of the Schwarzschild x-ray microscope using the compact SR-ring 'AURORA'

Shin Masui, Shouichirou Mochimaru, Norio Watanabe, Yoshiaki Horikawa, Hironari Yamada, Hiroshi Kihara

Proceedings Volume 1741, Soft X-Ray Microscopy; (1993) https://doi.org/10.1117/12.138723
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Using the compact SR-ring `AURORA,' imaging performance of the soft x-ray microscope with a Schwarzschild objective were evaluated. The multilayer mirrors of the objective were designed at a wavelength of 135 angstroms with 41 layers of Mo/Si. X rays from the source were filtered with a Be membrane (1.5 micrometers thickness), and then focused on a sample with a paraboloidal condenser. Visible and UV light was removed with the Be filter, and hard x ray was removed with the condenser. X rays transmitted through the sample were imaged on a detector (micro-channel plate) with the Schwarzschild objective. The image was converted to visible light by a fluorescent screen, and monitored with a CCD camera. Magnified ratio was 200. Spatial resolution was evaluated as 0.3 - 0.45 micrometers from an edge response.

Citation Download Citation

Shin Masui, Shouichirou Mochimaru, Norio Watanabe, Yoshiaki Horikawa, Hironari Yamada, and Hiroshi Kihara "Evaluation of the Schwarzschild x-ray microscope using the compact SR-ring 'AURORA'", Proc. SPIE 1741, Soft X-Ray Microscopy, (13 January 1993); https://doi.org/10.1117/12.138723

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