Fabricating binary optics in infrared and visible materials

Margaret B. Stern; Michael Holz; Theresa Rubico Jay

doi:10.1117/12.138908

13 January 1993 Fabricating binary optics in infrared and visible materials

Margaret B. Stern, Michael Holz, Theresa Rubico Jay

Proceedings Volume 1751, Miniature and Micro-Optics: Fabrication and System Applications II; (1993) https://doi.org/10.1117/12.138908
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

An overview of binary optics fabrication techniques, optimized to obtain high-quality micro- optics in visible and infrared materials, is presented. Maximum optical efficiency has been achieved for diffractive quartz microlenses at (lambda) equals 633 nm by controlling the critical fabrication parameters of alignment and etch depth. The degradation in optical efficiency of four-phase-level fused silica microlenses, resulting from an intentional 0.35 micrometers translational error, has been systematically measured as a function of lens speed (F/3 - F/65). Novel processing techniques that enable the fabrication of IR and visible refractive micro-optic arrays such as multilayer resist techniques, deep anisotropic Si-etching, and the formation of analog polymer lenslet arrays are described. Initial results are presented for both monolithic and hybrid integration of layered refractive micro-optic systems.

Citation Download Citation

Margaret B. Stern, Michael Holz, and Theresa Rubico Jay "Fabricating binary optics in infrared and visible materials", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); https://doi.org/10.1117/12.138908

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