Limitations of phase-measuring interferometry for surface characterization and testing: a review

Eugene R. Cochran III

doi:10.1117/12.139237

15 December 1992 Limitations of phase-measuring interferometry for surface characterization and testing: a review

Eugene R. Cochran III

Proceedings Volume 1776, Interferometry: Surface Characterization and Testing; (1992) https://doi.org/10.1117/12.139237
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Since its discovery, interferometry has grown into a powerful technique for the characterization and evaluation of optical surfaces. With the advent of phase-measurement algorithms, computers, and solid state detectors, it is now possible to acquire wavefront maps over a well sampled pupil in fractions of a second. Nevertheless, even though there have been significant advances, limitations of the technology should always be acknowledged. Emphasis in this paper is placed on reviewing basic interference, optical component, source, imaging, phase-shifting, detector, mechanical and acoustical stability, air turbulence, and sampling requirements for high accuracy and precision phase-shifting interferometry measurements. Limitations of the technology will be outlined, and where applicable, techniques developed to overcome limitations will be discussed and references sited.

Citation Download Citation

Eugene R. Cochran III "Limitations of phase-measuring interferometry for surface characterization and testing: a review", Proc. SPIE 1776, Interferometry: Surface Characterization and Testing, (15 December 1992); https://doi.org/10.1117/12.139237

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