Optical performance of amorphous carbon layers: nonuniformity of transmittance, reflectance, and scattering

Olaf Stenzel; Ralf Petrich

doi:10.1117/12.141010

4 March 1993 Optical performance of amorphous carbon layers: nonuniformity of transmittance, reflectance, and scattering

Olaf Stenzel, Ralf Petrich

Author Affiliations +

Proceedings Volume 1782, Thin Films for Optical Systems; (1993) https://doi.org/10.1117/12.141010
Event: Optical Systems Design '92, 1992, Berlin, Germany

Abstract

The optical properties of differently deposited amorphous carbon layers have been investigated by spectrophotometric means from the middle infrared up to the visible spectral region. The optical constants of the layers could be calculated by a numerical procedure which combines features of single-wavelength methods and multi-wavelength methods. Depending on the deposition technique applied, the optical constants of the layers have been found to vary over a wide range. Thus, refractive index values could be established between 1.6 and 2.9, while IR- absorption coefficients vary between 20/cm and 40,000/cm. Thus, the optical performance of the layers is nonuniform and may be influenced by selecting suitable deposition parameters. Due to the potentially wide range of optical constants of amorphous carbon, there are various possibilities for application as an optical thin film material. Applications as selective absorber coatings for solar physical purposes are discussed as well as applications as mechanically and chemically resistant and anti-reflection coatings on high-refractive index semiconducting materials (silicon, germanium).

Citation Download Citation

Olaf Stenzel and Ralf Petrich "Optical performance of amorphous carbon layers: nonuniformity of transmittance, reflectance, and scattering", Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); https://doi.org/10.1117/12.141010

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available