Planetary system for high-uniformity deposited layers on large substrates

Aime Perrin; Jean-Pierre Gailliard

doi:10.1117/12.141007

4 March 1993 Planetary system for high-uniformity deposited layers on large substrates

Aime Perrin, Jean-Pierre Gailliard

Proceedings Volume 1782, Thin Films for Optical Systems; (1993) https://doi.org/10.1117/12.141007
Event: Optical Systems Design '92, 1992, Berlin, Germany

Abstract

The thickness uniformity of vacuum deposited layers is a very important parameter for optical coatings. We have developed a computer program for the calculation of the uniformity as a function of the vapor distribution for planetary systems. This program shows the existence of a configuration such as the uniformity is practically independent of the vapor distribution. We give the example of an experimental system for processing four substrates of 300 mm diameter with a uniformity better than +/- 0.3% in a 1 m³ box coater.

Citation Download Citation

Aime Perrin and Jean-Pierre Gailliard "Planetary system for high-uniformity deposited layers on large substrates", Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); https://doi.org/10.1117/12.141007

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