Electrostatically actuated integrated optical nanomechanical devices

Paul Pliska; Walter Lukosz

doi:10.1117/12.141224

2 March 1993 Electrostatically actuated integrated optical nanomechanical devices

Paul Pliska, Walter Lukosz

Proceedings Volume 1793, Integrated Optics and Microstructures; (1993) https://doi.org/10.1117/12.141224
Event: Fibers '92, 1992, Boston, MA, United States

Abstract

We demonstrated that active integrated optical (IO) devices based on the IO nanomechanical effect can be actuated by electrostatic forces. In particular, we demonstrated: (1) an intensity modulator, (2) the deflection, and (3) the focusing and defocusing of a guided wave in a planar waveguide.

Citation Download Citation

Paul Pliska and Walter Lukosz "Electrostatically actuated integrated optical nanomechanical devices", Proc. SPIE 1793, Integrated Optics and Microstructures, (2 March 1993); https://doi.org/10.1117/12.141224

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