Integrated amorphous silicon linear image sensor

Tzung-Szu Weng; Biing-Seng Wu; Tung-Liang Lin; Hsiung-Ku Tsai; Hsiung-Kuang Chen; Sheng-Kai Hwang; Wen-Jian Lin; Mei-Soong Chen; Jin-Der Lee; In-Cha Hsieh; Jia-Shyong Cheng

doi:10.1117/12.131276

26 October 1992 Integrated amorphous silicon linear image sensor

Tzung-Szu Weng, Biing-Seng Wu, Tung-Liang Lin, Hsiung-Ku Tsai, Hsiung-Kuang Chen, Sheng-Kai Hwang, Wen-Jian Lin, Mei-Soong Chen, Jin-Der Lee, In-Cha Hsieh, Jia-Shyong Cheng

Author Affiliations +

Proceedings Volume 1814, Optical Sensors; (1992) https://doi.org/10.1117/12.131276
Event: International Symposium on Optoelectronics in Computers, Communications, and Control, 1992, Hsinchu, Taiwan

Abstract

An integrated a-Si:H linear image sensor with a TFT-type photoconductor was successfully demonstrated. Each sensor element of the linear image sensor consists of a TFT-type photoconductor, a storage capacitor, and two TFT switches. All the devices were fabricated simultaneously with the same metal-insulator-semiconductor structure used for the TFTs. The characteristics of the TFT-type photoconductor and the TFTs are measured. The operation principle of the image sensor array is described; and the dynamic testing of a sensor element is discussed.

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Tzung-Szu Weng, Biing-Seng Wu, Tung-Liang Lin, Hsiung-Ku Tsai, Hsiung-Kuang Chen, Sheng-Kai Hwang, Wen-Jian Lin, Mei-Soong Chen, Jin-Der Lee, In-Cha Hsieh, and Jia-Shyong Cheng "Integrated amorphous silicon linear image sensor", Proc. SPIE 1814, Optical Sensors, (26 October 1992); https://doi.org/10.1117/12.131276

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