Raman properties stoichiometry and the hardness of hydrogenated amorphous carbon

Matthias C. Krantz; David D. Saperstein; Richard L. White

doi:10.1117/12.148512

2 July 1993 Raman properties stoichiometry and the hardness of hydrogenated amorphous carbon

Matthias C. Krantz, David D. Saperstein, Richard L. White

Proceedings Volume 1857, Lasers and Optics for Surface Analysis; (1993) https://doi.org/10.1117/12.148512
Event: OE/LASE'93: Optics, Electro-Optics, and Laser Applications in Scienceand Engineering, 1993, Los Angeles, CA, United States

Abstract

Results of a systematic investigation of the Raman, hardness, and resistivity properties of sputtered amorphous carbon films on silicon substrates for hydrogen stoichiometries between 14% and 39% are presented. Frequency shift and line broadening effects of the Raman active graphite-like vibrations are consistent with a model of both harness and strain present in the amorphous network being independently controlled by the unprotonated sp3 carbon-carbon bonding fraction and the hydrogen concentration. Comparison to constraint counting models for covalent random networks indicates that the hardness of hydrogenated amorphous carbon follows the degree of network strain. We find no evidence for phonon confinement effects in micro crystals consistent with a random network structure without predominating microcrystals. Resistivity data indicate that the vibrational properties are largely independent of strong variations in the electronic properties with stoichiometry.

Citation Download Citation

Matthias C. Krantz, David D. Saperstein, and Richard L. White "Raman properties stoichiometry and the hardness of hydrogenated amorphous carbon", Proc. SPIE 1857, Lasers and Optics for Surface Analysis, (2 July 1993); https://doi.org/10.1117/12.148512

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available