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The high- intensity soft X-ray beams forma.tion and control are important for a large number of basic and appl ied researches. The ma.in types of soft X-ray sources are the synchrotron (SR) sources and high temperature plasma. sources. The specialized SR sources [1] are the most convenient and advantageous for technical appl ications, X-ray l ithography, for example. Whereas SR sources are very complexly bui lt and expensive apparatus. The high temperature plasma sources (laser plasma., pinch, etc.) are reliable and of moderate cost apparatus. The laser plasma sources have high efficiency and high spatial stabi lity of emission poi nt and wide waverange of soft X-ray emission [2-4]. But soft X-ray emission of al1 plasma sources is accompanying by intensive flows of plasma expansion products. To get rid of the plasma. expansion products various types of soft X-ray optics are used. The la;er irrad iation conversion into soft X-ravs prov ided by -6 focusing multi layer mirrors is about 10 [ 5, 6J . We have proposed to use wide-range wavegui de focusing soft X-ray optics with a laser plasma source to increase the conversion [ 7].
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