Development Of Nomarski Microscopy For Quantitative Determination Of Surface Topography(A)

J. S. Hartman; R. L. Gordon,; D. L. Lessor

doi:10.1117/12.957861

25 December 1979 Development Of Nomarski Microscopy For Quantitative Determination Of Surface Topography(A)

J. S. Hartman, R. L. Gordon,, D. L. Lessor

Proceedings Volume 0192, Interferometry; (1979) https://doi.org/10.1117/12.957861
Event: 23rd Annual Technical Symposium, 1979, San Diego, United States

Abstract

The use of Nomarski differential interference contrast (DIC) microscopy has been extended to provide nondestructive, quantitative analysis of a sample's surface topography. Theoretical modeling has determined the dependence of the image intensity on the micro-scope's optical components, the sample's optical properties, and the sample's surface orientation relative to the microscope. Results include expressions to allow the inversion of image intensity data to determine sample surface slopes. A commercial Nomarski system has been modified and characterized to allow the evaluation of the optical model. Data have been recorded with smooth, planar samples that verify the theoretical predictions.

Citation Download Citation

J. S. Hartman, R. L. Gordon,, and D. L. Lessor "Development Of Nomarski Microscopy For Quantitative Determination Of Surface Topography(A)", Proc. SPIE 0192, Interferometry, (25 December 1979); https://doi.org/10.1117/12.957861

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available