Development of an integrated optical microphone by means of waveguide structuring on PMMA

D. Garthe; Juergen Kobiela; Renate Kallweit

doi:10.1117/12.162733

19 November 1993 Development of an integrated optical microphone by means of waveguide structuring on PMMA

D. Garthe, Juergen Kobiela, Renate Kallweit

Proceedings Volume 1985, Physical Concepts and Materials for Novel Optoelectronic Device Applications II; (1993) https://doi.org/10.1117/12.162733
Event: Physical Concepts of Materials for Novel Optoelectronic Device Applications II, 1993, Trieste, Italy

Abstract

The paper describes the development of an optical microphone on an integrated-optical basis. The applied modulation principle is based on the change of the coupling ratio between two butt-coupled optical waveguides induced by lateral displacement of the guides. The coupling beam is first directed to a reflective membrane before being coupled into the receiving waveguide, allowing the membrane movement to be detected in a non-contact manner. The necessary waveguide structure is contained in an integrated-optical chip. This chip was produced with the aid of a technique based on the polymer PMMA, specially developed for this purpose. The necessary change of the refractive index was generated by means of a photochemical method. The coupling performance of the chips is largely in agreement with the theoretical values.

Citation Download Citation

D. Garthe, Juergen Kobiela, and Renate Kallweit "Development of an integrated optical microphone by means of waveguide structuring on PMMA", Proc. SPIE 1985, Physical Concepts and Materials for Novel Optoelectronic Device Applications II, (19 November 1993); https://doi.org/10.1117/12.162733

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