Average velocity distribution measurements of target debris from a laser-produced plasma

Howard Bender; Ann Marie Paula Eligon; D. O'Connell; William T. Silfvast

doi:10.1117/12.167987

1 February 1994 Average velocity distribution measurements of target debris from a laser-produced plasma

Howard Bender, Ann Marie Paula Eligon, D. O'Connell, William T. Silfvast

Proceedings Volume 2015, Applications of Laser Plasma Radiation; (1994) https://doi.org/10.1117/12.167987
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Measurements of the velocity and particulate size distributions as well as calculations of ejected mass have been made on solid Sn and Au laser-produced plasma (LPP) targets. The experiments were conducted under conditions associated with soft x-ray projection lithography (SXPL). Results indicate that small particulates, less than 1 - 2 micrometers in diameter, with speeds in excess of 9000 cm/s, are the dominant constituents of the debris.

Citation Download Citation

Howard Bender, Ann Marie Paula Eligon, D. O'Connell, and William T. Silfvast "Average velocity distribution measurements of target debris from a laser-produced plasma", Proc. SPIE 2015, Applications of Laser Plasma Radiation, (1 February 1994); https://doi.org/10.1117/12.167987

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