Multibeam holographic optical sensor for control of diamond turning

Bao Hua Zhuang; Ji-Hua Zhang; Keqian Lu; Rongjiu Han

doi:10.1117/12.162101

22 October 1993 Multibeam holographic optical sensor for control of diamond turning

Bao Hua Zhuang, Ji-Hua Zhang, Keqian Lu, Rongjiu Han

Proceedings Volume 2066, Industrial Optical Sensing and Metrology: Applications and Integration; (1993) https://doi.org/10.1117/12.162101
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States

Abstract

The purpose of this paper is to describe a new precision displacement sensor--Multi-Beam Holographic Optical Sensor (MBHOS) for control of diamond turning--with the use of holographic optical element (HOE) technology. MBHOS is actually an integrated sensor which serves as three sensors. It can be used with the function of a single sensor to be a feedback component in closed loop control system and it can be used in the differential mode to detect the angular components of the micro-tool servo motion and to eliminate or to minimize the vibration errors with the function of three sensors. The ir HOEs are made by using a computer generated hologram (CGH) method. A computer simulation method is used to analyze the performances of this integrated sensor system. The initial experimental results of the MBHOS are obtained. The MBHOS is both compact and inexpensive.

Citation Download Citation

Bao Hua Zhuang, Ji-Hua Zhang, Keqian Lu, and Rongjiu Han "Multibeam holographic optical sensor for control of diamond turning", Proc. SPIE 2066, Industrial Optical Sensing and Metrology: Applications and Integration, (22 October 1993); https://doi.org/10.1117/12.162101

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KEYWORDS

Sensors

Holographic optical elements

Control systems

Holography

Diamond turning

Servomechanisms

Optical sensors

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