Semi-automatic procedure of oscillation parameter modifications of optical images of microobjects

Dmitry Alexandrov Usanov; Olga Nicolaevna Kurenkova

doi:10.1117/12.162112

22 October 1993 Semi-automatic procedure of oscillation parameter modifications of optical images of microobjects

Dmitry Alexandrov Usanov, Olga Nicolaevna Kurenkova

Proceedings Volume 2066, Industrial Optical Sensing and Metrology: Applications and Integration; (1993) https://doi.org/10.1117/12.162112
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States

Abstract

To provide an improvement of vibrotest process of the small-sized units and systems the optic method of determination of resonance frequencies, quality and oscillation amplitudes has been developed. Sensitivity of the method can be compared with the sensitivity properties of the well known interference- holographic-vibration methods. The typical for resonance of oscillation phenomena of amplitude increasing has been used for oscillation parameter determination.

Citation Download Citation

Dmitry Alexandrov Usanov and Olga Nicolaevna Kurenkova "Semi-automatic procedure of oscillation parameter modifications of optical images of microobjects", Proc. SPIE 2066, Industrial Optical Sensing and Metrology: Applications and Integration, (22 October 1993); https://doi.org/10.1117/12.162112

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