Focus-tracing method applied in optical probes

Ji-Hua Zhang; Bao Hua Zhuang; Shenghua Ye

doi:10.1117/12.156493

22 September 1993 Focus-tracing method applied in optical probes

Ji-Hua Zhang, Bao Hua Zhuang, Shenghua Ye

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156493
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

Off-focus detection methods have been successfully applied in measuring micro-displacement and surface roughness. but there are imperfects in these methods. For example range of measurement is too small and accuracy of measurement is seriously affected by the inclination of measured surface To overcome these problems focus-tracing methods have been developed. In this paper a moving voice coil is used as focus actuator to drive the object lens up and down. The basic composition and characteristics of the actuator are described The features of displacement and frequency response of the probe are analysed. Some experiment results are given.

Citation Download Citation

Ji-Hua Zhang, Bao Hua Zhuang, and Shenghua Ye "Focus-tracing method applied in optical probes", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156493

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