Holographic testing of relief with submicron accuracy

Yuri N. Zakharov

doi:10.1117/12.165405

10 December 1993 Holographic testing of relief with submicron accuracy

Yuri N. Zakharov

Proceedings Volume 2108, International Conference on Holography, Correlation Optics, and Recording Materials; (1993) https://doi.org/10.1117/12.165405
Event: Holography, Correlation Optics, and Recording Materials, 1993, Chernivsti, Ukraine

Abstract

Diffuse surface relief profile is obtained by contour map generation with the help of multiple- wavelength holography at basic and doubled frequencies of ruby laser. Correlation with etalon may also be produced.

Citation Download Citation

Yuri N. Zakharov "Holographic testing of relief with submicron accuracy", Proc. SPIE 2108, International Conference on Holography, Correlation Optics, and Recording Materials, (10 December 1993); https://doi.org/10.1117/12.165405

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available