Determination of the optical constants of thin absorbing films on a slightly absorbing substrate from photometric measurements

Ivan Z. Indutnyi; Apollinary I. Stetsun

doi:10.1117/12.191967

31 October 1994 Determination of the optical constants of thin absorbing films on a slightly absorbing substrate from photometric measurements

Ivan Z. Indutnyi, Apollinary I. Stetsun

Author Affiliations +

Proceedings Volume 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1994) https://doi.org/10.1117/12.191967
Event: Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics: International Workshop, 1993, Kiev, Ukraine

Abstract

The method of determining optical constants of a thin film, deposited on a transparent, or slightly absorbing substrate, is proposed. It requires us to make measurements under normal incidence of the transmittance, the air-incident and substrate-incident reflectances, and film thickness. In the UV spectral region the additional measurements of reflectance for the opaque to light films are needed. It permits us to receive more precise optical constant values even for the high absorbing films. To illustrate the method, optical constants of the GeSe₂ and GeSe₂Ag_0.75 thin films were determined in the wide region of the spectrum.

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Ivan Z. Indutnyi and Apollinary I. Stetsun "Determination of the optical constants of thin absorbing films on a slightly absorbing substrate from photometric measurements", Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); https://doi.org/10.1117/12.191967

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