High-damage threshold antireflectors by physical-vapor-deposited amorphous fluoropolymer

Robert Chow; Maura K. Spragge; Gary E. Loomis; Ian M. Thomas; Frank Rainer; Richard L. Ward; Mark R. Kozlowski

doi:10.1117/12.180886

28 July 1994 High-damage threshold antireflectors by physical-vapor-deposited amorphous fluoropolymer

Robert Chow, Maura K. Spragge, Gary E. Loomis, Ian M. Thomas, Frank Rainer, Richard L. Ward, Mark R. Kozlowski

Proceedings Volume 2114, Laser-Induced Damage in Optical Materials: 1993; (1994) https://doi.org/10.1117/12.180886
Event: Laser-Induced Damage in Optical Materials: 1993, 1993, Boulder, CO, United States

Abstract

High laser-resistant anti-reflective coatings were made from an amorphous fluoropolymer (Teflon AF2400) material by physical vapor deposition. Single layers of Teflon AF2400 were thermally deposited in a vacuum chamber. The refractive index and adhesion of the coatings were determined as a function of deposition rate (2 to 20 angstroms/s), substrate temperature (20 to 200 degree(s)C), and glow-discharge bias potential (-1500 to 1500 V).

Citation Download Citation

Robert Chow, Maura K. Spragge, Gary E. Loomis, Ian M. Thomas, Frank Rainer, Richard L. Ward, and Mark R. Kozlowski "High-damage threshold antireflectors by physical-vapor-deposited amorphous fluoropolymer", Proc. SPIE 2114, Laser-Induced Damage in Optical Materials: 1993, (28 July 1994); https://doi.org/10.1117/12.180886

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available