Soft x-ray output from the spherical pinch plasma radiation source (SPX II) for microlithography applications

Jiong Chen; Emilio Panarella; B. Hilko; Haibo Chen

doi:10.1117/12.175809

13 May 1994 Soft x-ray output from the spherical pinch plasma radiation source (SPX II) for microlithography applications

Jiong Chen, Emilio Panarella, B. Hilko, Haibo Chen

Author Affiliations +

Proceedings Volume 2194, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV; (1994) https://doi.org/10.1117/12.175809
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

Study of soft x-ray (0.8 - 10 keV) output from the SPX II, a spherical pinched plasma radiation source, is presented. The soft x-ray output increases with the discharge voltage. The output is also a function of the gases used and pressures. A simple analytic model was developed which can scale the imploding wave velocity with respect to the discharge voltage and the gas density. Experiments to measure the imploding wavefronts were carried out. The predictions of the model agree well with the measured results in a wide range of the parameter space.

Citation Download Citation

Jiong Chen, Emilio Panarella, B. Hilko, and Haibo Chen "Soft x-ray output from the spherical pinch plasma radiation source (SPX II) for microlithography applications", Proc. SPIE 2194, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV, (13 May 1994); https://doi.org/10.1117/12.175809

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available