RIE control by optical emission endpoint detection in IR focal plane array production

Glennis J. Orloff

doi:10.1117/12.179672

13 July 1994 Reactive ion etching (RIE) control by optical emission endpoint detection in IR focal plane array production

Glennis J. Orloff

Author Affiliations +

Proceedings Volume 2228, Producibility of II-VI Materials and Devices; (1994) https://doi.org/10.1117/12.179672
Event: SPIE's International Symposium on Optical Engineering and Photonics in Aerospace Sensing, 1994, Orlando, FL, United States

Abstract

The Microelectronics Manufacturing Science and Technology (MMST) program, a program mutually funded by ARPA, the U.S. Air Force, and Texas Instruments, was recently completed at TI and has had great impact on the fabrication of silicon-based devices. The MMST factory relied heavily on sensors to control processing and increase throughput and yield. It is our intent to utilize this MMST technology for infrared focal plane array (IRFPA) production. Aspects of our program to incorporate MMST technology into IRFPA production are discussed emphasizing the use of automated optical-emission-endpoint detection. Automated optical-emission-endpoint detection was successfully demonstrated on a RIE reactor. Optical emission was used to monitor as well as control our dielectric etch. The operation and application of optical emission endpoint detection for IRFPA fabrication are presented.

Citation Download Citation

Glennis J. Orloff "Reactive ion etching (RIE) control by optical emission endpoint detection in IR focal plane array production", Proc. SPIE 2228, Producibility of II-VI Materials and Devices, (13 July 1994); https://doi.org/10.1117/12.179672

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available