Scale-up of LPE processes for flexibility in manufacturing

Peter W. Norton; Paul LoVecchio; Guy P. Pultz; James Hughes; Timothy Robertson; Vince Lukach; Kwok Wong

doi:10.1117/12.179678

13 July 1994 Scale-up of LPE processes for flexibility in manufacturing

Peter W. Norton, Paul LoVecchio, Guy P. Pultz, James Hughes, Timothy Robertson, Vince Lukach, Kwok Wong

Proceedings Volume 2228, Producibility of II-VI Materials and Devices; (1994) https://doi.org/10.1117/12.179678
Event: SPIE's International Symposium on Optical Engineering and Photonics in Aerospace Sensing, 1994, Orlando, FL, United States

Abstract

Focal plane arrays fabricated in Hg_1-xCd_xTe have matured to the point where they are entering pilot production for military and civilian applications. Loral chose the p-on-n heterostructure photodiode architecture produced by a two step LPE process for production scale-up because of its demonstrated high performance over a broad range of cut-off wavelengths from approximately equals 4 micrometers to > 15 micrometers . To meet the manufacturing requirements of high throughput and flexibility, Loral has successfully scaled and transferred into production, both tellurium rich horizontal slider (for growth of the active n-type base layer) and mercury rich vertical dipping (for growth of the p-type cap layer) technologies. This approach capitalizes on the advantages of each process to maximize the producibility of LPE films in a manufacturing environment. This paper discusses the advantages of horizontal Te-rich growth. Production reactors have demonstrated excellent compositional uniformity (+/- 0.005 in x) over 24 cm². Issues related to the scale-up of the equipment are discussed.

Citation Download Citation

Peter W. Norton, Paul LoVecchio, Guy P. Pultz, James Hughes, Timothy Robertson, Vince Lukach, and Kwok Wong "Scale-up of LPE processes for flexibility in manufacturing", Proc. SPIE 2228, Producibility of II-VI Materials and Devices, (13 July 1994); https://doi.org/10.1117/12.179678

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