Secondary neutral mass spectrometry (SNMS) depth profile analysis of optical coatings

Peter Weissbrodt; Dirk Mademann; Erich J. Hacker

doi:10.1117/12.192139

4 November 1994 Secondary neutral mass spectrometry (SNMS) depth profile analysis of optical coatings

Peter Weissbrodt, Dirk Mademann, Erich J. Hacker

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192139
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

Electron-gas SNMS offers favorable properties, often useful or even necessary for the depth profiling of optical coatings. A short introduction into this method, examples of SNMS depth profile analysis in the fields of composite oxide layers, control of complex thin film components, damage of coatings and characterization of multilayers for soft X-ray optics, as well as a report of ongoing developments are given, demonstrating the performance, the limits and the future potential of the SNMS depth profile analysis.

Citation Download Citation

Peter Weissbrodt, Dirk Mademann, and Erich J. Hacker "Secondary neutral mass spectrometry (SNMS) depth profile analysis of optical coatings", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192139

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