Laser processing of Y1Ba2Cu3O7 superconducting thin films

Peter A. Atanasov; Rumen I. Tomov; Valery S. Serbezov

doi:10.1117/12.195889

12 December 1994 Laser processing of Y₁Ba₂Cu₃O₇ superconducting thin films

Peter A. Atanasov, Rumen I. Tomov, Valery S. Serbezov

Proceedings Volume 2332, Second International Symposium on Advanced Laser Technologies; (1994) https://doi.org/10.1117/12.195889
Event: Advanced Laser Technologies: International Symposium, 1993, Prague, Czech Republic

Abstract

Superconducting Y₁Ba₂Cu₃O₇ thin films were prepared by in-situ oxygen plasma-assisted laser deposition. It was revealed that cw CO₂ laser heating of substrate surface may be a method for reduction of particulate density. The buffer layers such as Ba(Sr)TiO₃ and YSZ(111) were successfully experimented for preparation of good superconducting thin films. A multistep superfast CO₂ laser annealing was investigated as a method of modification of the Y₁Ba₂Co₃O₇ thin films on Si. It is shown that N₂ laser ablation may be a proper technique for patterning Y₁Ba₂Cu₃O₇ thin films. The films were characterized by EDAX, SEM, XRD and Raman spectroscopy.

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Peter A. Atanasov, Rumen I. Tomov, and Valery S. Serbezov "Laser processing of Y₁Ba₂Cu₃O₇ superconducting thin films", Proc. SPIE 2332, Second International Symposium on Advanced Laser Technologies, (12 December 1994); https://doi.org/10.1117/12.195889

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