Comparison of controller tuning methods for temperature uniformity control in a rapid thermal processor

K. S. Balakrishnan; Wonhui Cho; Thomas F. Edgar

doi:10.1117/12.186774

16 September 1994 Comparison of controller tuning methods for temperature uniformity control in a rapid thermal processor

K. S. Balakrishnan, Wonhui Cho, Thomas F. Edgar

Author Affiliations +

Proceedings Volume 2336, Manufacturing Process Control for Microelectronic Devices and Circuits; (1994) https://doi.org/10.1117/12.186774
Event: Microelectronic Manufacturing, 1994, Austin, TX, United States

Abstract

Multiloop PI control and quadratic dynamic matrix control (QDMC) algorithms are applied for the temperature uniformity control of rapid thermal processing (RTP). Input and output variable transformations are done based on the singular value decomposition (SVD) of the process gain matrix and the (mu) -interaction measure analysis of compensated transfer function matrix. Multiloop PI control with transformation of variables shows improvement in transient responses to set point changes compared with the multiloop PI control without variable transformations and QDMC. Further studies on systematic tuning method for this multiloop PI control is needed to reduce the offsets and to obtain the uniform transient responses.

Citation Download Citation

K. S. Balakrishnan, Wonhui Cho, and Thomas F. Edgar "Comparison of controller tuning methods for temperature uniformity control in a rapid thermal processor", Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); https://doi.org/10.1117/12.186774

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