Paper
16 September 1994 Integrated manufacturing approach to attain benchmark team performance
Shau-Ron Chen, Andrew Nguyen, Hussein Naguib
Author Affiliations +
Abstract
A Self-Directed Work Team (SDWT) was developed to transfer a polyimide process module from the research laboratory to our wafer fab facility for applications in IC specialty devices. The SDWT implemented processes and tools based on the integration of five manufacturing strategies for continuous improvement. These were: Leadership Through Quality (LTQ), Total Productive Maintenance (TMP), Cycle Time Management (CTM), Activity-Based Costing (ABC), and Total Employee Involvement (TEI). Utilizing these management techniques simultaneously, the team achieved six sigma control of all critical parameters, increased Overall Equipment Effectiveness (OEE) from 20% to 90%, reduced cycle time by 95%, cut polyimide manufacturing cost by 70%, and improved its overall team member skill level by 33%.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shau-Ron Chen, Andrew Nguyen, and Hussein Naguib "Integrated manufacturing approach to attain benchmark team performance", Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); https://doi.org/10.1117/12.186789
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Semiconducting wafers

Manufacturing

Phase modulation

Coating

Inspection

Control systems

Calibration

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