Process controls for the factories of the future

Jorge Agraz-Guerena

doi:10.1117/12.186773

16 September 1994 Process controls for the factories of the future

Jorge Agraz-Guerena

Proceedings Volume 2336, Manufacturing Process Control for Microelectronic Devices and Circuits; (1994) https://doi.org/10.1117/12.186773
Event: Microelectronic Manufacturing, 1994, Austin, TX, United States

Abstract

The information revolution has been driven by the ever increasing processing power that the microelectronics industry has produced since the invention of the integrated circuit. The 1992 National Technology Roadmap' for semiconductors projects that the industry capabilities will evolve as follows:

Citation Download Citation

Jorge Agraz-Guerena "Process controls for the factories of the future", Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); https://doi.org/10.1117/12.186773

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