Radio frequency tags systems to initiate system processing

Harold O. Madsen; David W. Madsen

doi:10.1117/12.186775

16 September 1994 Radio frequency tags systems to initiate system processing

Harold O. Madsen, David W. Madsen

Proceedings Volume 2336, Manufacturing Process Control for Microelectronic Devices and Circuits; (1994) https://doi.org/10.1117/12.186775
Event: Microelectronic Manufacturing, 1994, Austin, TX, United States

Abstract

This paper describes the automatic identification technology which has been installed at Applied Magnetic Corp. MR fab. World class manufacturing requires technology exploitation. This system combines (1) FluoroTrac cassette and operator tracking, (2) CELLworks cell controller software tools, and (3) Auto-Soft Inc. software integration services. The combined system eliminates operator keystrokes and errors during normal processing within a semiconductor fab. The methods and benefits of this system are described.

Citation Download Citation

Harold O. Madsen and David W. Madsen "Radio frequency tags systems to initiate system processing", Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); https://doi.org/10.1117/12.186775

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