Calibration of optical probe instruments for the measurement of surface microtopography

E. Mainsah; Weiping P. Dong; Tim King

doi:10.1117/12.198678

4 January 1995 Calibration of optical probe instruments for the measurement of surface microtopography

E. Mainsah, Weiping P. Dong, Tim King

Proceedings Volume 2349, Industrial Optical Sensors for Metrology and Inspection; (1995) https://doi.org/10.1117/12.198678
Event: Photonics for Industrial Applications, 1994, Boston, MA, United States

Abstract

Although noncontacting instruments for the measurement of the 3D microtopography of surfaces are now widely available and are used on a routine basis in many branches of science and engineering, information on many aspects of their use, from measurement through characterization to interpretation, is still limited. One important area in which clear information is required is calibration. This paper sets out to breach some of the gap by proposing routines for the complete calibration of optical probe based instruments for the measurement of surface microtopography. It is suggested that contacting and noncontacting instruments can be calibrated in a very similar manner, but that a few subtle but relevant differences need to be borne in mind and the calibration routine modified accordingly. The calibration of stylus instruments using a calibrated sphere as practiced by some instrument manufacturers (and as is common practice with coordinate measurement machines - CMM) has been advocated with the observation that this technique might be of even greater relevance in optical probe based systems. A new technique based on optical sensors is also proposed for the calibration of the diameter of the optical probe.

Citation Download Citation

E. Mainsah, Weiping P. Dong, and Tim King "Calibration of optical probe instruments for the measurement of surface microtopography", Proc. SPIE 2349, Industrial Optical Sensors for Metrology and Inspection, (4 January 1995); https://doi.org/10.1117/12.198678

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available