X-ray reflectivity analysis of Pt/Co multilayered films

Zhihong Jiang; Chang-Lin Kuo; Rongfa Guo; Defang Shen; Tian-Shen Shi

doi:10.1117/12.190755

26 October 1994 X-ray reflectivity analysis of Pt/Co multilayered films

Zhihong Jiang, Chang-Lin Kuo, Rongfa Guo, Defang Shen, Tian-Shen Shi

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190755
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

Pt/Co multilayered films were prepared by DC sputtering and electron beam evaporation and grazing angle X-ray reflectivity analysis was used to determine the film structure. It was found that the interfaces of the evaporated samples became flatter and more obscure when the substrate temperature rose. The sputtered samples had relatively flat interfaces and the atoms were more closely packed than the evaporated samples.

Citation Download Citation

Zhihong Jiang, Chang-Lin Kuo, Rongfa Guo, Defang Shen, and Tian-Shen Shi "X-ray reflectivity analysis of Pt/Co multilayered films", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190755

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