Evolution of structure, phase composition and x-ray reflectivity of multilayer mirrors Mo-(B+C) after annealing at 400-1100 degrees C

I. A. Kopylets; V. V. Kondratenko; Anatoli I. Fedorenko; E. N. Zubarev; O. V. Poltseva; A. G. Ponomarenko; I. I. Lyakhovskaya

doi:10.1117/12.200277

23 January 1995 Evolution of structure, phase composition and x-ray reflectivity of multilayer mirrors Mo-(B+C) after annealing at 400-1100°C

I. A. Kopylets, V. V. Kondratenko, Anatoli I. Fedorenko, E. N. Zubarev, O. V. Poltseva, A. G. Ponomarenko, I. I. Lyakhovskaya

Author Affiliations +

Proceedings Volume 2453, X-Ray Optics and Surface Science; (1995) https://doi.org/10.1117/12.200277
Event: X-ray Optics and Surface Science, 1994, none, Russian Federation

Abstract

Structural, phase and chemical stabilities of X-ray multilayer mirrors Mo-(B + C) with period in range 8 - 11.5 nm were studied at temperatures 250 to 1100 degree(s)C by small-angle and large-angle X-ray diffraction and electron microscopy methods. Two amorphizations at approximately equals 450 degree(s)C and approximately equals 750 degree(s)C and two crystallizations at approximately equals 650 degree(s)C and approximately equals 850 degree(s)C of Mo-based layers were observed due to formation of molybdenum carbides MoC (hex), (gamma) - MoC and Mo₂C instead of metal Mo and formation of molybdenum borides MoB₂ and Mo₂B₅ instead of molybdenum carbides, respectively. Both amorphizations of Mo-based layers were accompanied by smoothening of interfaces and by increase of multilayer X-ray reflectivity at (lambda) equals 0.154 nm. Both crystallizations of Mo-based layers promoted development of interface roughness and decrease of multilayers X-ray reflectivity. The destruction of Mo-(B + C) multilayers at approximately equals 1100 degree(s)C was caused by Mo₂B₅ layers recrystallization.

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I. A. Kopylets, V. V. Kondratenko, Anatoli I. Fedorenko, E. N. Zubarev, O. V. Poltseva, A. G. Ponomarenko, and I. I. Lyakhovskaya "Evolution of structure, phase composition and x-ray reflectivity of multilayer mirrors Mo-(B+C) after annealing at 400-1100°C", Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); https://doi.org/10.1117/12.200277

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