Investigation of surface and superthin layers using x-ray methods

Igor Fedorovich Mikhailov; Svetlana Serafimovn Borisova; Larisa Petrovna Fomina; I. N. Babenko

doi:10.1117/12.200274

23 January 1995 Investigation of surface and superthin layers using x-ray methods

Igor Fedorovich Mikhailov, Svetlana Serafimovn Borisova, Larisa Petrovna Fomina, I. N. Babenko

Proceedings Volume 2453, X-Ray Optics and Surface Science; (1995) https://doi.org/10.1117/12.200274
Event: X-ray Optics and Surface Science, 1994, none, Russian Federation

Abstract

Methods of X-ray optics, X-ray structure and fluorescence analysis were applied for superthin (3-100 angstrom) films investigation. The way of surface relief statistic characteristics determination by comparison of model calculations with experimental X-ray reflection curves is proposed. Surface Fourier-spectra were reconstructed by scattering indicatrices. The original method of X-ray analysis in grazing beam has been applied to films as thin as 15 angstrom. The results of investigation of film phase composition, density and microroughness in the stage of island growth and continuous layer formation in deposited metals Ni, Ti, Nb are discussed from the point of view of their different abilities for oxidation. The trend to strict constancy of nuclei height beginning with four monatomic layers has been found. Niobium films consisting of two- and three-layers of oxides and niobium solid solution (Nb-O) may be continuous already at 20 angstrom thickness. In titanium films at 15 angstrom thickness the transition from island state to continuous bilayer Ti/TiO₂ have been revealed.

Citation Download Citation

Igor Fedorovich Mikhailov, Svetlana Serafimovn Borisova, Larisa Petrovna Fomina, and I. N. Babenko "Investigation of surface and superthin layers using x-ray methods", Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); https://doi.org/10.1117/12.200274

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