Structure and optical properties of multilayer x-ray mirrors for the long wavelength part (3.1-4.4 nm) of water window

Anatoli I. Fedorenko; V. V. Kondratenko; Yurii P. Pershin; O. V. Poltseva; E. N. Zubarev; L. L. Balakireva; V. V. Didyk; V. V. Burtsev

doi:10.1117/12.200265

23 January 1995 Structure and optical properties of multilayer x-ray mirrors for the long wavelength part (3.1-4.4 nm) of water window

Anatoli I. Fedorenko, V. V. Kondratenko, Yurii P. Pershin, O. V. Poltseva, E. N. Zubarev, L. L. Balakireva, V. V. Didyk, V. V. Burtsev

Author Affiliations +

Proceedings Volume 2453, X-Ray Optics and Surface Science; (1995) https://doi.org/10.1117/12.200265
Event: X-ray Optics and Surface Science, 1994, none, Russian Federation

Abstract

Structure and optical properties (at (lambda) equals 0.154 nm and (lambda) equals 3.16 nm) of W - Ti, W - TiN, W - Sc and Cr - Sc multilayer x-ray mirrors for the long wave part of 'water window' wavelength range were studied by methods of the x-ray diffractometry and cross-sectional electron microscopy. The reflectivities at (lambda) equals 0.154 nm are increased going from W - TiN, Cr - Sc, W - Ti to W - Sc multilayers. Cr - Sc mirrors have highest reflectivity and resolution at (lambda) equals 3.16 nm. Influence of the ambient atmosphere on optical properties of multilayer mirrors is shown.

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Anatoli I. Fedorenko, V. V. Kondratenko, Yurii P. Pershin, O. V. Poltseva, E. N. Zubarev, L. L. Balakireva, V. V. Didyk, and V. V. Burtsev "Structure and optical properties of multilayer x-ray mirrors for the long wavelength part (3.1-4.4 nm) of water window", Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); https://doi.org/10.1117/12.200265

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