Thermal stability of normal incidence multilayer mirrors for x-ray wavelength near carbon K-edge

E. A. Bugaev; Anatoli I. Fedorenko; V. V. Kondratenko; E. N. Zubarev

doi:10.1117/12.200278

23 January 1995 Thermal stability of normal incidence multilayer mirrors for x-ray wavelength near carbon K-edge

E. A. Bugaev, Anatoli I. Fedorenko, V. V. Kondratenko, E. N. Zubarev

Proceedings Volume 2453, X-Ray Optics and Surface Science; (1995) https://doi.org/10.1117/12.200278
Event: X-ray Optics and Surface Science, 1994, none, Russian Federation

Abstract

Annealing effects in short-period multilayers Cr₃C₂/C, TiC/C, Cr₃C₂/(B+C) and CrB₂/C were studied in wide temperature range approximately equals 200-1200 degree(s)C by X-ray scattering and cross-sectional microscopy. It was shown that thermodynamic equilibrium of layers materials at their interfaces and stabilization of layer structure by impurities and heat treatment are effective approaches to short-period multilayers with enhanced thermal stability of their structure and optical properties.

Citation Download Citation

E. A. Bugaev, Anatoli I. Fedorenko, V. V. Kondratenko, and E. N. Zubarev "Thermal stability of normal incidence multilayer mirrors for x-ray wavelength near carbon K-edge", Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); https://doi.org/10.1117/12.200278

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