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Applications of the whispering gallery (WhG) optics for the steering of the synchrotron radiation (SR) are considered. The general principles of operation of the vertical SR beamline for proximity X-ray lithography are discussed. The possibilities of the WhG optics for the transportation of the SR beam to the second floor and for the steering of the hard X-ray radiation are analyzed.
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Igor V. Kozhevnikov, "Whispering gallery optics for synchrotron radiation beam lines," Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); https://doi.org/10.1117/12.200267