Surface and interface phenomena in titanium dioxide films studied by spectroellipsometry

Mariuca Gartner; Constanta Parlog; Constantin Ghita; A. Andrei; Adrian Ivan

doi:10.1117/12.203528

8 March 1995 Surface and interface phenomena in titanium dioxide films studied by spectroellipsometry

Mariuca Gartner, Constanta Parlog, Constantin Ghita, A. Andrei, Adrian Ivan

Proceedings Volume 2461, ROMOPTO '94: Fourth Conference in Optics; (1995) https://doi.org/10.1117/12.203528
Event: ROMOPTO '94: 4th Conference on Optics, 1994, Bucharest, Romania

Abstract

An extensive spectroellipsometric study was performed on titanium dioxide (TiO₂) and TiO₂(Mⁿ⁺) thin films deposited on three different substrates (soda-lime glass, silicon wafers and thick aluminum film/glass) by the sol-gel method. The properties of the resultant films are process dependent. The effects of substrate nature, thermal treatment temperature and doping on the films properties are discussed. The spectroellipsometric results (correlated with X-ray diffraction, Rutherford Backscattering Spectroscopy and X-ray Photoelectron Spectroscopy data) provide precise information on the modification of the optical properties (optical constants, film thickness and interband transitions) of the different types of TiO₂ films with the above mentioned preparation parameters.

Citation Download Citation

Mariuca Gartner, Constanta Parlog, Constantin Ghita, A. Andrei, and Adrian Ivan "Surface and interface phenomena in titanium dioxide films studied by spectroellipsometry", Proc. SPIE 2461, ROMOPTO '94: Fourth Conference in Optics, (8 March 1995); https://doi.org/10.1117/12.203528

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