Laser-annealed deep ohmic contacts

Petr Machac; Vladimir Myslik; Martin Vrnata

doi:10.1117/12.203613

1 March 1995 Laser-annealed deep ohmic contacts

Petr Machac, Vladimir Myslik, Martin Vrnata

Proceedings Volume 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference; (1995) https://doi.org/10.1117/12.203613
Event: Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, 1994, Konstanz, Germany

Abstract

The contribution deals with the results of our work on ohmic contact formation, the process optimization. The contacts should be optimized with respect to chemical composition of metallization, energy density of laser radiation, and repetition rate of laser pulses. These contacts also enable us to interconnect the surface of the samples with a very thin layer under the surface ((delta) -doped layer).

Citation Download Citation

Petr Machac, Vladimir Myslik, and Martin Vrnata "Laser-annealed deep ohmic contacts", Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); https://doi.org/10.1117/12.203613

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