NovaTube: first excimer laser design for quasi-sealed-off operation

Ulrich Rebhan; Bernard K. Nikolaus; Frank Voss; Dirk Basting; Rainer Paetzel

doi:10.1117/12.204949

31 March 1995 NovaTube: first excimer laser design for quasi-sealed-off operation

Ulrich Rebhan, Bernard K. Nikolaus, Frank Voss, Dirk Basting, Rainer Paetzel

Proceedings Volume 2502, Gas Flow and Chemical Lasers: Tenth International Symposium; (1995) https://doi.org/10.1117/12.204949
Event: Gas Flow and Chemical Lasers: Tenth International Symposium, 1994, Friedrichshafen, Germany

Abstract

Excimer lasers are the most efficient and powerful sources for ultraviolet radiation. Our new laser cavity design NovaTube^TM is the result of many years of extensive material research. Several test runs with NovaTube^TM lasers at 193 nm (ArF) and 157 nm (F₂) demonstrated excellent gas lifetime data when compared to conventionally designed lasers. For the first time a 50 W KrF laser was successfully operated sealed-off for more than 1 billion pulses. By this outstanding performance the operating costs can be cut 10 times using the new laser tube technology.

Citation Download Citation

Ulrich Rebhan, Bernard K. Nikolaus, Frank Voss, Dirk Basting, and Rainer Paetzel "NovaTube: first excimer laser design for quasi-sealed-off operation", Proc. SPIE 2502, Gas Flow and Chemical Lasers: Tenth International Symposium, (31 March 1995); https://doi.org/10.1117/12.204949

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