Electrostatic lenses with corrected chromatic and spherical aberrations

Lubov A. Baranova; Stella Y. Yavor; Eric Munro

doi:10.1117/12.221580

25 September 1995 Electrostatic lenses with corrected chromatic and spherical aberrations

Lubov A. Baranova, Stella Y. Yavor, Eric Munro

Proceedings Volume 2522, Electron-Beam Sources and Charged-Particle Optics; (1995) https://doi.org/10.1117/12.221580
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

An electrostatic lens is proposed consisting of a set of cylindrical electrodes with gaps, where the axially symmetric, quadrupole and octopole components of the field are generated by a proper choice of electrode potentials. The conditions are found of correction of the chromatic and spherical aberrations in one direction.

Citation Download Citation

Lubov A. Baranova, Stella Y. Yavor, and Eric Munro "Electrostatic lenses with corrected chromatic and spherical aberrations", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); https://doi.org/10.1117/12.221580

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