Micromachined infrared detectors based on pyroelectric thin films

Dennis L. Polla; P. F. Baude; Linda Pham; Q. Mei; J. R. Choi; Chian-Ping Ye; L. F. Francis; Tho Truong Vu

doi:10.1117/12.218259

8 September 1995 Micromachined infrared detectors based on pyroelectric thin films

Dennis L. Polla, P. F. Baude, Linda Pham, Q. Mei, J. R. Choi, Chian-Ping Ye, L. F. Francis, Tho Truong Vu

Proceedings Volume 2552, Infrared Technology XXI; (1995) https://doi.org/10.1117/12.218259
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Solid-state micromachining techniques have been used in the fabrication of low-stress silicon nitride thermal isolation structures for pyroelectric detectors. Thin films of PbTiO(subscript 3/ and other related Perovskite materials are integrated on these structures. Process compatibility with NMOS electronics is demonstrated.

Citation Download Citation

Dennis L. Polla, P. F. Baude, Linda Pham, Q. Mei, J. R. Choi, Chian-Ping Ye, L. F. Francis, and Tho Truong Vu "Micromachined infrared detectors based on pyroelectric thin films", Proc. SPIE 2552, Infrared Technology XXI, (8 September 1995); https://doi.org/10.1117/12.218259

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