Application of a diffractive lens element to a lithographic projection lens

Hitoshi Ohashi; Keiichi Kuba; Toshiro Okamura; Tetsuya Ishii; Yasuhiro Kamihara

doi:10.1117/12.215307

27 July 1995 Application of a diffractive lens element to a lithographic projection lens

Hitoshi Ohashi, Keiichi Kuba, Toshiro Okamura, Tetsuya Ishii, Yasuhiro Kamihara

Proceedings Volume 2577, International Conference on Applications of Optical Holography; (1995) https://doi.org/10.1117/12.215307
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan

Abstract

Reported in this paper are our experimental studies which were made to ensure the feasibility of applying a diffractive lens element to a lithographic projection lens. The studies include lens design, diffractive element fabrication and the method, exposure experiments and the results, and some analysis of the results. It can be concluded from the results that the application is possible although improving the diffraction efficiency of the diffractive element is a significant issue for practical use.

Citation Download Citation

Hitoshi Ohashi, Keiichi Kuba, Toshiro Okamura, Tetsuya Ishii, and Yasuhiro Kamihara "Application of a diffractive lens element to a lithographic projection lens", Proc. SPIE 2577, International Conference on Applications of Optical Holography, (27 July 1995); https://doi.org/10.1117/12.215307

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