Generic technology, measurement, and standards issues in micromachining and microfabrication

Dennis A. Swyt

doi:10.1117/12.222644

26 September 1995 Generic technology, measurement, and standards issues in micromachining and microfabrication

Dennis A. Swyt

Proceedings Volume 2640, Microlithography and Metrology in Micromachining; (1995) https://doi.org/10.1117/12.222644
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

Microelectromechanical systems (MEMS) are integrally-fabricated hybrids of micromechanical and microelectronic elements which serve together as sensors, actuators or both. While there are proprietary issues in MEMS products currently in or near commercial production, there are also a number of generic technology, measurement and standards issues which may be addressed.

Citation Download Citation

Dennis A. Swyt "Generic technology, measurement, and standards issues in micromachining and microfabrication", Proc. SPIE 2640, Microlithography and Metrology in Micromachining, (26 September 1995); https://doi.org/10.1117/12.222644

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available