Silicon membrane gyroscope with electrostatic actuation and sensing

David Wood; George Cooper; James S. Burdess; Alun J. Harris; Jane L. Cruickshank

doi:10.1117/12.221185

15 September 1995 Silicon membrane gyroscope with electrostatic actuation and sensing

David Wood, George Cooper, James S. Burdess, Alun J. Harris, Jane L. Cruickshank

Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221185
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

Presented here are preliminary results on a resonant gyroscope that is very simple to fabricate. It is made using both silicon and glass substrates, and involves the minimum of mask steps. Actuation and detection are all achieved via capacitive means. The minimum rotation rate that has been able to be sensed is 300 degrees/s; improvements in the manufacturing process could reduce this to as low as 0.07 degrees/s before the rate detection would become limited by electrical noise.

Citation Download Citation

David Wood, George Cooper, James S. Burdess, Alun J. Harris, and Jane L. Cruickshank "Silicon membrane gyroscope with electrostatic actuation and sensing", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); https://doi.org/10.1117/12.221185

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