Benzocyclobutene as planarization resin for charge-coupled devices

Donald J. Perettie; Michael J. Radler; J. L. Smith

doi:10.1117/12.236122

25 March 1996 Benzocyclobutene as planarization resin for charge-coupled devices

Donald J. Perettie, Michael J. Radler, J. L. Smith

Proceedings Volume 2654, Solid State Sensor Arrays and CCD Cameras; (1996) https://doi.org/10.1117/12.236122
Event: Electronic Imaging: Science and Technology, 1996, San Jose, CA, United States

Abstract

Benzocyclobutene (BCB) is a commercial product of The Dow Chemical Company sold under the irade name Cyclocene TM Electronic Resins for use in multi-chip modules and interlayer dielectric applications. New versions of the material are being developed as both overcoat and planarization materials for use in active and passive components of flat panel displays and charge coupled devices. Specifically, BCB has shown excellent results for color filter elements as either an overcoat or undercoat material.

Citation Download Citation

Donald J. Perettie, Michael J. Radler, and J. L. Smith "Benzocyclobutene as planarization resin for charge-coupled devices", Proc. SPIE 2654, Solid State Sensor Arrays and CCD Cameras, (25 March 1996); https://doi.org/10.1117/12.236122

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