Integrated optic devices using micromachined metal membranes

Gregory A. Magel

doi:10.1117/12.236141

25 March 1996 Integrated optic devices using micromachined metal membranes

Gregory A. Magel

Proceedings Volume 2686, Integrated Optics and Microstructures III; (1996) https://doi.org/10.1117/12.236141
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

Metal membranes fabricated using a surface micromachining process can be integrated with passive optical waveguides on silicon substrates to form active devices. Electrostatic actuation of a membrane into contact with a waveguide alters both the real and imaginary parts of the propagation constant of the guided mode. This effect has been used to demonstrate both on-off and routing type integrated optic switches, and has potential application to other devices such as variable attenuators and tunable Bragg filters.

Citation Download Citation

Gregory A. Magel "Integrated optic devices using micromachined metal membranes", Proc. SPIE 2686, Integrated Optics and Microstructures III, (25 March 1996); https://doi.org/10.1117/12.236141

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