A New High Precision Differential Spectrometer: Construction, Characteristics, And Capabilities

R. B. Stephens; G. K. Sorensen

doi:10.1117/12.931712

30 April 1981 A New High Precision Differential Spectrometer: Construction, Characteristics, And Capabilities

R. B. Stephens, G. K. Sorensen

Proceedings Volume 0276, Optical Characterization Techniques for Semiconductor Technology; (1981) https://doi.org/10.1117/12.931712
Event: 1981 Microlithography Conferences, 1981, San Jose, United States

Abstract

A unique differential spectrometer has been developed for the quantitative examination of surfaces. It combines a tuneable pulsed dye laser light source, a flexible precision sample holder, silicon photodiode-in-integrating sphere detectors, and a desktop computer controller/analyzer. This combination enables very precise measurements--twiddlel% systematic errors and twiddle.02% random errors in reflection and transmission measurements. The spectrome-ter has been applied to the investigation of the structure of various component films used in semiconductor devices and in a basic study of the molecular-molecular interactions of dyes adsorbed on surfaces. With only minor modifications, this device can make transient spectroscopy measurements with a resolution of twiddle 10 nsec. It can also be used for a variety of modulation spectroscopies. We will be exploring those areas in the future.

Citation Download Citation

R. B. Stephens and G. K. Sorensen "A New High Precision Differential Spectrometer: Construction, Characteristics, And Capabilities", Proc. SPIE 0276, Optical Characterization Techniques for Semiconductor Technology, (30 April 1981); https://doi.org/10.1117/12.931712

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