Aspheric form testing using multiple-wavelength approaches in combination with subNyquist techniques

Tilo Pfeifer; Horst Konstantin Mischo; Jens Evertz; Rainer Tutsch

doi:10.1117/12.246769

19 August 1996 Aspheric form testing using multiple-wavelength approaches in combination with sub-Nyquist techniques

Tilo Pfeifer, Horst Konstantin Mischo, Jens Evertz, Rainer Tutsch

Proceedings Volume 2775, Specification, Production, and Testing of Optical Components and Systems; (1996) https://doi.org/10.1117/12.246769
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

Aspheres with no rotational symmetry offer new perspectives for the development of high power laser optics. Confronted with the dynamic range of the manufacturing process recently opened by scientists in ultra-precision engineering, interferometric form testing is having to meet the challenge posed by complex mirror shapes with high local slopes and/or stepheights exceeding the range of unambiguity which conventional interferometry can handle. For this reason, special interferometric techniques such as two wavefront interferometry, sub-Nyquist- and sub-aperture-approaches are to be combined, to overcome the above mentioned problems. But even if the refined experimental setup is capable of resolving the interferometric fringe pattern, the question as to how the data collected should be interpreted, is extremely time-consuming. The use of ray-tracing software in experimental setups with chromatic aberrations or distortions is, therefore inevitable, building a theoretical background to distinguish between system and manufacturing errors.

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Tilo Pfeifer, Horst Konstantin Mischo, Jens Evertz, and Rainer Tutsch "Aspheric form testing using multiple-wavelength approaches in combination with sub-Nyquist techniques", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); https://doi.org/10.1117/12.246769

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KEYWORDS

Mirrors

Interferometry

Aspheric lenses

Wavefronts

Manufacturing

CCD cameras

Signal to noise ratio

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