Nanometric precision bidimensional optical flat testing

Raymond Mercier; Michel Lamare; P. Picart; Jean-Paul Marioge

doi:10.1117/12.246741

19 August 1996 Nanometric precision bidimensional optical flat testing

Raymond Mercier, Michel Lamare, P. Picart, Jean-Paul Marioge

Proceedings Volume 2775, Specification, Production, and Testing of Optical Components and Systems; (1996) https://doi.org/10.1117/12.246741
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

Absolute optical flat testing using the classical three flat method poses repositioning problems and basically only yields one absolute diameter. Although not giving access tot he mean curvature, the method we propose only requires relative displacements and yields a 2D map of the departure of the flat to the best sphere. Simulations and experimental data have been achieved up to a 301 by 301 sampling, showing a repeatability in the neighborhood of 1 nm P-V.

Citation Download Citation

Raymond Mercier, Michel Lamare, P. Picart, and Jean-Paul Marioge "Nanometric precision bidimensional optical flat testing", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); https://doi.org/10.1117/12.246741

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