Surface finish assessment of synthetic quartz glass

Axel Kiesel; Angela Duparre; Manuela Haase; Frank Coriand; Horst Truckenbrodt

doi:10.1117/12.246743

19 August 1996 Surface-finish assessment of synthetic quartz glass

Axel Kiesel, Angela Duparre, Manuela Haase, Frank Coriand, Horst Truckenbrodt

Proceedings Volume 2775, Specification, Production, and Testing of Optical Components and Systems; (1996) https://doi.org/10.1117/12.246743
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

Synthetic quartz glass surfaces have been examined after consecutive stages of the manufacturing process: cutting, flat honing, and polishing. Results are presented of microtopography investigations performed using several optical and non-optical methods such as optical and mechanical profilometry, atomic force microscopy, and integrated light scattering. Rms-roughness values have been determined for each step of the surface finishing process. Subsurface damage effects have been imaged by scanning electron microscopy.

Citation Download Citation

Axel Kiesel, Angela Duparre, Manuela Haase, Frank Coriand, and Horst Truckenbrodt "Surface-finish assessment of synthetic quartz glass", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); https://doi.org/10.1117/12.246743

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