AFM with piezoresistive Wheatstone bridge cantilever: noise performance and applications in contact and noncontact mode

Teodor Gotszalk; R. Linnemann; Ivo W. Rangelow; Piotr Dumania; Piotr B. Grabiec

doi:10.1117/12.238192

8 April 1996 AFM with piezoresistive Wheatstone bridge cantilever: noise performance and applications in contact and noncontact mode

Teodor Gotszalk, R. Linnemann, Ivo W. Rangelow, Piotr Dumania, Piotr B. Grabiec

Author Affiliations +

Proceedings Volume 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications; (1996) https://doi.org/10.1117/12.238192
Event: Metal/Nonmetal Microsystems: Physics, Technology, and Applications, 1995, Polanica Zdroj, Poland

Abstract

The atomic force microscope (AFM) is a very sensitive instrument to examine the topography of surfaces and their properties. The sensitivity of the AFM depends on the choice of the detector system, which is used to observe the cantilever deflection. A cantilever with integrated Wheatstone piezoresistive bridge as a deflection sensor was used in experiments. We describe noise properties of the piezoresistive Wheatstone bridge cantilever and show examples of topography measurements in contact and noncontact mode.

Citation Download Citation

Teodor Gotszalk, R. Linnemann, Ivo W. Rangelow, Piotr Dumania, and Piotr B. Grabiec "AFM with piezoresistive Wheatstone bridge cantilever: noise performance and applications in contact and noncontact mode", Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); https://doi.org/10.1117/12.238192

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