Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures

Christopher W. Dyck; James H. Smith; Samuel L. Miller; E. M. Russick; C. L. J. Adkins

doi:10.1117/12.251210

23 September 1996 Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures

Christopher W. Dyck, James H. Smith, Samuel L. Miller, E. M. Russick, C. L. J. Adkins

Proceedings Volume 2879, Micromachining and Microfabrication Process Technology II; (1996) https://doi.org/10.1117/12.251210
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

Results are presented supporting the use of supercritical carbon dioxide (SCCO₂) drying to enhance the yield of surface-micromachined micromechanical devices following the final release etch. The equipment and extraction process of the SCCO₂ system are described, and results of successfully released cantilevered beams and microengines are presented. A new system capable of drying 6 inch wafers is also described.

Citation Download Citation

Christopher W. Dyck, James H. Smith, Samuel L. Miller, E. M. Russick, and C. L. J. Adkins "Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures", Proc. SPIE 2879, Micromachining and Microfabrication Process Technology II, (23 September 1996); https://doi.org/10.1117/12.251210

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